UHD-AUV-020
- Full Auto 저조도형 UV 장비로 반도체 및 LED sawing 후, UV tape을 curing해 UV tape의 접착력을 제거함으로써 이후 die attach 공정에서 효율성을 높여 주는 장비
| CATEGORIES | ITEM | SPECIFICATION |
| BASIC SPECIFICATIONS | Dimension / Weight Color Painting Applicable Wafer Size Material Handling Cassette / UV Chamber Quantity UV Lamp Cooling Environment Tact Time | 730(W) x 1200(D) x 1350(H) ㎜ / 400 kg Gray & Dark Gray Glossy Heat Drying Paint 8" / 12" (inch) Auto 2 pcs / 1 piece FAN Type PC 200 EA / hr |
| UV CHAMBER | Reflection Mirror UV Irradiation Measure Unit Chamber Temperature | STS Mirror GUVA-S10GM Max. 30 ºC |
| UV LAMP | Type Max. Lamp Output Distance Between Lamp Electrodes Lamp Quantity Life Time Wavelength | Low Illumination Mercury PL Lamp 40 W 400 ㎜ 7 EA 500 hrs UVA 365 ㎚ |
| UV INTEGRATOR | Illumination Deviation Noise Level Initialize Time Return Initialize Time | 12 ㎽/㎠ (Center) ±10 % 73 dB/㎠ (Max.) 30 sec 30 sec |
| FACILITIES | Power Supply Power Consumption Main Breaker Air Pressure Air Consumption Nitrogen Pressure Exhaust Duct | AC 210~230V, 50/60 Hz, Single phase 5 kVA 30 A 0.5 to 0.8 MPa 18 m3/min or less 0.29 MPa 2.7 ~ 5.1 m3/min |