UHD-AUV-010
- 자동 고압 UV 장비로 반도체 및 LED sawing(dicing) 후, UV tape를 순간 curing 해 UV Tape의 접착력을 제거함으로써 이후 die attach 공정에서 효율성을 높여 주는 장비
| CATEGORIES | ITEM | SPECIFICATION |
| BASIC SPECIFICATIONS | Dimension / Weight Color Painting Applicable Wafer Size Material Handling Cassette / UV Chamber Quantity UV Lamp Cooling Environment Tact Time | 1160(W) x 910(D) x 1650(H) ㎜ / 700 kg Gray & Navy Glossy Heat Drying Paint 8" / 12" (inch) Auto 2 pcs / 1 piece Blower Type PC 180 EA / hr |
| UV LAMP | Type Voltage Distance Between Lamp Electrodes Lamp Quantity Life Time Wavelength | High Pressure Mercury Lamp 620 V 450 ㎜ 1 EA 1,000 hrs UVA 320~390 ㎚ (peak 350 ㎚) |
| UV INTEGRATOR | Illumination Deviation Noise Level Initialize Time Return Initialize Time | 70 ~ 100 ㎽/㎠ (Center) ±20 % 73 dB/㎠ (Max.) 30 sec 30 sec |
| FACILITIES | Communication Protocol Power Supply Power Consumptions Main Breaker Air Pressure Air Consumption Nitrogen Pressure Exhaust Duct | IMS, PIO in TCP/IP (for AGV) AC 210~230V, 50/60 ㎐, Single phase 5 KVA 50 A 0.5 to 0.8 MPa 18 ㎥/min. or less 0.29 MPa 2.7 ~ 5.1 ㎥/min |